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The ingot cutting of mono-crystal silicon on plates and laser gettering impurity in semiconductors structures
Description
Manufacturing of silicon plates for integrated microcircuits; removal fastdiffusing[br][/br]impurity from active areas of Integrated microcircuits.[br][/br]Field of application:[br][/br]Microelectronics.[br][/br]Developed tools:[br][/br]The cutting tool and recommendations with the account crystallographic factors for[br][/br]silicon plates of orientation (001) and (111)[br][/br]on:[br][/br]-mode of ingot cutting of monocrystal silicon on plates;[br][/br]mode of laser getter I ng fast–diff using impurity.[br][/br]Advantages:[br][/br]-methods of cutting allow to receive more uniform distribution and considerable[br][/br]decrease in depth of the broken layers to surfaces of cut off plates, to improve[br][/br]geometrical parameters – to reduce a deflection and to eliminate a surface micro–wavlness;[br][/br]-gettering methods of impurity allow to form gettering the high-capacity areas[br][/br]excluding an exit of dispositions on a working surface of plates, to raise an exit of suitable semiconductor structures.
Technology Type
Process
Design
Technology Differentiation and Uniqueness
New technology, new design
Technological Keywords
The ingot, cutting, mono-crystal silicon, plates, laser gettering, impurity, semiconductors structures
Development Stage
Prototype (demonstration available for testing)
Results of demonstration test available
Currently in use/production
Intellectual Property Rights
Secret Know-How
Range of Applications
Microelectronics
Classifier Used at the Enterprise Europe Network
Automotive, Transport and Logistics
Chemicals
Environment
Materials
Nano- and Microtechnologies
Space and Aerospace
Classifier Used at the Technology Transfer Network of yet2.com Inc.
Aerospace
Automotive
Chemistry
Electronics
Environmental
Instrumentation
Manufacturing
Materials
Physics
Techniques
Preferable Regions
North America
South America
Europe
Asia
Africa
Australia
Environmental Impact
No
Type of Collaboration Sought
R&D Contract
License
For Sale
Terms&Restrictions
No
Available Technical Assistance
Documentation
Personnel
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