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Manufacturig and restoration of cathodes, targets of high cleanliness
Description
Appointment:[br][/br]Cathodes, targets, the details of industrial equipment sprayed on installations arc,[br][/br]magnetron deposition of coverings.[br][/br]Technical characteristics:[br][/br]Manufacturing techniques are based on electron beam fusion of chemically active,[br][/br]refractory metals in vacuum that allows to exclude pollution of melted metal. The technology of usual and high–speed diffusive welding is used and moulding in the[br][/br]conditions of vacuum.[br][/br]Advantages:[br][/br]-The equipment of small capacity (ten in kilowatts) is used; -Sources of pollution of[br][/br]melted metal are excluded;[br][/br]-Controllable structure of a received material;[br][/br]- Possibility of realisation of restoration of the worn out cathodes, targets.[br][/br]Field of application:[br][/br]Manufacture of microelectronics,[br][/br]integrated microcircuits.
Technology Type
Process
Design
Technology Differentiation and Uniqueness
New process, new design
Technological Keywords
Manufacturig and restoration of cathodes, targets, high cleanliness
Development Stage
Prototype (demonstration available for testing)
Results of demonstration test available
Currently in use/production
Intellectual Property Rights
Secret Know-How
Range of Applications
Manufacture of microelectronics, integrated microcircuits.
Classifier Used at the Enterprise Europe Network
Automotive, Transport and Logistics
Chemicals
Environment
Intelligent Energy
Maritime Industry and Services
Materials
Nano- and Microtechnologies
Space and Aerospace
Classifier Used at the Technology Transfer Network of yet2.com Inc.
Aerospace
Automotive
Chemistry
Electronics
Environmental
Instrumentation
Manufacturing
Materials
Physics
Techniques
Preferable Regions
North America
South America
Europe
Asia
Africa
Australia
Environmental Impact
No
Type of Collaboration Sought
R&D Contract
License
For Sale
Terms&Restrictions
No
Available Technical Assistance
Documentation
Personnel
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